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Fabrication of silicon kinoform lenses for hard x-ray focusing by electron beam lithography and deep reactive ion etching
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10.1116/1.2825167
/content/avs/journal/jvstb/26/1/10.1116/1.2825167
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2825167
/content/avs/journal/jvstb/26/1/10.1116/1.2825167
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/content/avs/journal/jvstb/26/1/10.1116/1.2825167
2008-01-04
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of silicon kinoform lenses for hard x-ray focusing by electron beam lithography and deep reactive ion etching
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2825167
10.1116/1.2825167
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