1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Hybrid nanofabrication processes utilizing diblock copolymer nanotemplate prepared by self-assembled monolayer based surface neutralization
Rent:
Rent this article for
USD
10.1116/1.2830693
/content/avs/journal/jvstb/26/1/10.1116/1.2830693
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2830693
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Contact angle measurements of OTS (circles) and MPTS (squares) treated native Si oxide substrate as a function of immersing time. The concentration of SAM solution was solution for each case.

Image of FIG. 2.
FIG. 2.

SEM images of PS nanotemplate fabricated with different immersion times: (a) 24 h and (b) 48 h. The substrate is Si with native oxide.

Image of FIG. 3.
FIG. 3.

SEM images of PS nanotemplate fabricated with PS--PMMA film thicknesses (a) 22 nm, (b) 35 nm, and (c) 45 nm. (d) shows the film thickness measured by ellipsometer as a function of spin speed. The substrate is Si with native oxide.

Image of FIG. 4.
FIG. 4.

SEM images and hole size distribution for PS--PMMA with molecular weights (a) and (b) . The substrate is Si with native oxide.

Image of FIG. 5.
FIG. 5.

SEM images of PS nanotemplate formed on (a) poly-Si, (b) PE-CVD , and (c) ALD .

Image of FIG. 6.
FIG. 6.

(a) Etching selectivity between thermal and PS blank films as a function of total working pressure showing the highest selectivity 1.7. (b) SEM image and (c) XPS Si spectrum of nanoporous sample.

Image of FIG. 7.
FIG. 7.

(a) SEM image of Au nanodot array on Si substrate and (b) high resolution TEM image of a gold nanodot.

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/1/10.1116/1.2830693
2008-01-16
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hybrid nanofabrication processes utilizing diblock copolymer nanotemplate prepared by self-assembled monolayer based surface neutralization
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/1/10.1116/1.2830693
10.1116/1.2830693
SEARCH_EXPAND_ITEM