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Ta nanotubes grown by glancing angle deposition
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10.1116/1.2842299
/content/avs/journal/jvstb/26/2/10.1116/1.2842299
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/2/10.1116/1.2842299
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Figures

Image of FIG. 1.
FIG. 1.

Schematic illustrating the described process to create nanotube arrays with (a) a hole array in a PMMA layer fabricated by -beam lithography, (b) a Cr layer deposited onto the pattern by nondirectional sputtering, (c) Cr nanorings after a lift-off process, and (d) Ta nanotubes grown on the rings by GLAD.

Image of FIG. 2.
FIG. 2.

Plan-view SEM micrographs of (a) 200-, (b) 400-, and (c) 600-nm-tall Ta nanotubes, and (d) tilted image from 400-nm-tall tubes, including a higher magnification image in the inset.

Image of FIG. 3.
FIG. 3.

Effective inner nanotube diameter as a function of tube height for the nine tubes shown in Figs. 2(a)–2(c). The inset shows the contours of the inner cross-sectional area of one typical tube (indicated by the arrow) for three different heights , 400, and 600 nm, as obtained from SEM micrographs.

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/content/avs/journal/jvstb/26/2/10.1116/1.2842299
2008-04-01
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ta nanotubes grown by glancing angle deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/2/10.1116/1.2842299
10.1116/1.2842299
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