(a) Schematic diagram of the optical interference system. (b) Computer simulated result of the interference pattern by using the three beam interference system.
Computer simulated results of the interference pattern with different intensity ratios of the three incident beams.
Curves of the ellipticity as a function of the incident intensity ratio.
Architecture of the optical experimental system.
Flowchart of the procedure for the holographic lithography.
SEM pictures of the experimental results with different incident intensity ratios.
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