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Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography
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10.1116/1.2905240
/content/avs/journal/jvstb/26/3/10.1116/1.2905240
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/3/10.1116/1.2905240
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic diagram of the optical interference system. (b) Computer simulated result of the interference pattern by using the three beam interference system.

Image of FIG. 2.
FIG. 2.

Computer simulated results of the interference pattern with different intensity ratios of the three incident beams.

Image of FIG. 3.
FIG. 3.

Curves of the ellipticity as a function of the incident intensity ratio.

Image of FIG. 4.
FIG. 4.

Architecture of the optical experimental system.

Image of FIG. 5.
FIG. 5.

Flowchart of the procedure for the holographic lithography.

Image of FIG. 6.
FIG. 6.

SEM pictures of the experimental results with different incident intensity ratios.

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/content/avs/journal/jvstb/26/3/10.1116/1.2905240
2008-04-22
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Controllable fabrication of the micropore shape of two-dimensional photonic crystals using holographic lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/3/10.1116/1.2905240
10.1116/1.2905240
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