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Smooth sidewall in InP-based photonic crystal membrane etched by -based inductively coupled plasma
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10.1116/1.2945299
/content/avs/journal/jvstb/26/4/10.1116/1.2945299
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/4/10.1116/1.2945299
/content/avs/journal/jvstb/26/4/10.1116/1.2945299
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/content/avs/journal/jvstb/26/4/10.1116/1.2945299
2008-08-12
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Smooth sidewall in InP-based photonic crystal membrane etched by N2-based inductively coupled plasma
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/4/10.1116/1.2945299
10.1116/1.2945299
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