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Fabrication of period blazed transmission gratings on silicon-on-insulator wafers
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10.1116/1.2968613
/content/avs/journal/jvstb/26/6/10.1116/1.2968613
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2968613
/content/avs/journal/jvstb/26/6/10.1116/1.2968613
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/content/avs/journal/jvstb/26/6/10.1116/1.2968613
2008-12-01
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of 200nm period blazed transmission gratings on silicon-on-insulator wafers
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2968613
10.1116/1.2968613
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