1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Si-containing block copolymers for self-assembled nanolithography
Rent:
Rent this article for
USD
10.1116/1.2981079
/content/avs/journal/jvstb/26/6/10.1116/1.2981079
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2981079
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Self-assembled PS-PFS patterns. (a) In grooves of different widths, a composite image (from Ref. 17), (b) in a 60° angle (from Ref. 22), (c) in narrow grooves, showing ellipsoidal distortion of the PFS microdomains (from Ref. 34). In each case the PS matrix has been selectively etched.

Image of FIG. 2.
FIG. 2.

Plan and side views of a section of a period PDMS cylinder array ordered within a wide shallow silica groove (groove edges are not shown). The PS matrix and PDMS surface layer have been etched.

Image of FIG. 3.
FIG. 3.

(a) Plan view of period PDMS cylinders oriented perpendicular to the edges of the template (from Ref. 25). (b) period PDMS sphere array templated by a sparse array of HSQ pillars, some of which are circled (from Ref. 36). The PS matrix and PDMS surface layer have been etched.

Image of FIG. 4.
FIG. 4.

PDMS cylinders confined within circular pits curve to follow the pit edges. The number of concentric rings is governed by the template diameter. The central feature can be a PS dot (dark) or a PDMS dot (white, middle image). The PS matrix and PDMS surface layer have been removed. From Ref. 35.

Image of FIG. 5.
FIG. 5.

(a) Co dot array with period made by etching a Co film using PS-PFS as a mask. (b) Upper panel: PS-PFS self-assembled in a template made from ARC. Middle panel: pattern transferred into silica, after removal of the ARC. Lower panel: pattern transferred into W.

Image of FIG. 6.
FIG. 6.

(a) Array of Co rings. Each ring consists of two concentric rings, closely spaced. (From Ref. 35). (b) Array of period lines etched into a PEDOT thin film (Ref. 47).

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/6/10.1116/1.2981079
2008-12-01
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Si-containing block copolymers for self-assembled nanolithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2981079
10.1116/1.2981079
SEARCH_EXPAND_ITEM