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Impact of trench width roughness on the graphoepitaxial assembly of block copolymers
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10.1116/1.2987963
/content/avs/journal/jvstb/26/6/10.1116/1.2987963
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2987963
/content/avs/journal/jvstb/26/6/10.1116/1.2987963
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/content/avs/journal/jvstb/26/6/10.1116/1.2987963
2008-12-01
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of trench width roughness on the graphoepitaxial assembly of block copolymers
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2987963
10.1116/1.2987963
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