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Latent image formation in chemically amplified extreme ultraviolet resists with low activation energy for deprotection reaction
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10.1116/1.2990787
/content/avs/journal/jvstb/26/6/10.1116/1.2990787
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2990787
/content/avs/journal/jvstb/26/6/10.1116/1.2990787
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/content/avs/journal/jvstb/26/6/10.1116/1.2990787
2008-12-01
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Latent image formation in chemically amplified extreme ultraviolet resists with low activation energy for deprotection reaction
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2990787
10.1116/1.2990787
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