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Contributions of resist polymers to innate material roughness
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10.1116/1.2993259
/content/avs/journal/jvstb/26/6/10.1116/1.2993259
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2993259
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/content/avs/journal/jvstb/26/6/10.1116/1.2993259
2008-12-01
2014-08-21
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Scitation: Contributions of resist polymers to innate material roughness
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2993259
10.1116/1.2993259
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