1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Contributions of resist polymers to innate material roughness
Rent:
Rent this article for
USD
10.1116/1.2993259
/content/avs/journal/jvstb/26/6/10.1116/1.2993259
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2993259

Figures

Image of FIG. 1.
FIG. 1.

Surface roughness of ESCAP copolymer containing resist as a function of depth into the film.

Image of FIG. 2.
FIG. 2.

Surface roughness of ESCAP terpolymer containing resist as a function of depth into the film.

Image of FIG. 3.
FIG. 3.

Surface roughness of methacrylate terpolymer containing resist as a function of depth into the film.

Image of FIG. 4.
FIG. 4.

Surface roughness of fluoropolymer containing resist as a function of depth into the film.

Image of FIG. 5.
FIG. 5.

IMR and sensitivity of resists showing exposure and bake conditions.

Image of FIG. 6.
FIG. 6.

IMR and sensitivity of resists showing type of resist polymer.

Image of FIG. 7.
FIG. 7.

Examples of half pitch resolution of model resists exposed with EUV.

Image of FIG. 8.
FIG. 8.

Examples of half pitch resolution of model resist exposed with DUV.

Image of FIG. 9.
FIG. 9.

LER and sensitivity of resists showing exposure and bake conditions.

Image of FIG. 10.
FIG. 10.

LER and sensitivity of resists showing exposure and bake conditions.

Tables

Generic image for table
TABLE I.

Summary of polymer properties.

Generic image for table
TABLE II.

Summary of resist sensitivity and IMR for different exposure and bake conditions.

Generic image for table
TABLE III.

Summary of resist sensitivity , LER, LWR, and calculated death constant for different exposure and bake conditions.

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/6/10.1116/1.2993259
2008-12-01
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Contributions of resist polymers to innate material roughness
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2993259
10.1116/1.2993259
SEARCH_EXPAND_ITEM