1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications
Rent:
Rent this article for
USD
10.1116/1.2998728
/content/avs/journal/jvstb/26/6/10.1116/1.2998728
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2998728
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Fabrication process of large-area dielectric (H1) and metallic (H2) freestanding gratings. (a) -thick (100)-Si substrate. [(b) and (c)] Deposition of and layers on the front and back sides of the substrate. (d) Nickel grating obtained by UV contact lithography and lift-off, deposition of an additional protection layer. (e) Optical lithography and subsequent etching of the layer (definition of the membrane surface). (f) Etching of the Si substrate in a TMAH solution. (g) Membrane drilling by reactive ion etching. (H1) Ni removal by chemical etching and critical point drying technique (see the text). (H2) Multidirectional gold deposition on the grating.

Image of FIG. 2.
FIG. 2.

SEM images of -thick SiC freestanding gratings showing bar sticking due to the drying process after liquid immersion. (a) Period , bar width . (b) Period , bar width .

Image of FIG. 3.
FIG. 3.

SEM images of -thick (a) SiC and (b) freestanding gratings obtained by critical point drying. (a) Period , bar width . (b) Period , bar width .

Image of FIG. 4.
FIG. 4.

SEM images of a gold-coated freestanding grating (period , slit width , and thickness ). The core of the grating is made of to ensure the rigidity of the structure.

Image of FIG. 5.
FIG. 5.

Experimental (solid curves) and calculated (dashed curves) optical transmission spectra of two freestanding -thick gold-coated gratings, for TM polarization (magnetic field parallel to the slits) and normal incidence. Grating G1 (dark): period , slit width . Grating G2 (red): period , slit width .

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/6/10.1116/1.2998728
2008-11-03
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Large-area dielectric and metallic freestanding gratings for midinfrared optical filtering applications
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.2998728
10.1116/1.2998728
SEARCH_EXPAND_ITEM