Schematic process flow of DLC-based NIL template fabrication.
Average percentage of fluorine in the modified DLC surface as a function of depth for three different chamber pressures, as measured by XPS.
(a) PMMA resist after imprint using a DLC template on which the fluorinated antiadhesion coating was damaged. The left part of the image shows a large area from which the PMMA resist film was completely detached following separation. (b) The same pattern, imprinted with a perfectly fluorinated DLC template.
(a) HSQ mask on DLC surface—top view. (b) Pillars on DLC NIL template, fabricated using the HSQ mask—side view.
Array of dots imprinted on PMMA with a fluorinated DLC template.
Cross section of fluorinated PMMA film on substrate, imprinted with untreated template. The pattern consists of lines array with pitch size.
Array of PDMS fences, formed from a fluorinated PMMA mold. (The cracks visible on the high magnification image are in the Au discharge layer, which was sputtered on the top of the surface prior the scanning electron microscopy imaging.)
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