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Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
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10.1116/1.3013281
    + View Affiliations - Hide Affiliations
    Affiliations:
    1 Department of Chemical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    2 Department of Mechanical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    3 IBM, T. J. Watson Research Center, Yorktown Heights, New York 10598
    4 Department of Mechanical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    5 Department of Applied Physics and Applied Mathematics, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    a) Electronic mail: sw2128@columbia.edu
    J. Vac. Sci. Technol. B 26, 2394 (2008); http://dx.doi.org/10.1116/1.3013281
/content/avs/journal/jvstb/26/6/10.1116/1.3013281
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3013281
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic process flow of DLC-based NIL template fabrication.

Image of FIG. 2.
FIG. 2.

Average percentage of fluorine in the modified DLC surface as a function of depth for three different chamber pressures, as measured by XPS.

Image of FIG. 3.
FIG. 3.

(a) PMMA resist after imprint using a DLC template on which the fluorinated antiadhesion coating was damaged. The left part of the image shows a large area from which the PMMA resist film was completely detached following separation. (b) The same pattern, imprinted with a perfectly fluorinated DLC template.

Image of FIG. 4.
FIG. 4.

(a) HSQ mask on DLC surface—top view. (b) Pillars on DLC NIL template, fabricated using the HSQ mask—side view.

Image of FIG. 5.
FIG. 5.

Array of dots imprinted on PMMA with a fluorinated DLC template.

Image of FIG. 6.
FIG. 6.

Cross section of fluorinated PMMA film on substrate, imprinted with untreated template. The pattern consists of lines array with pitch size.

Image of FIG. 7.
FIG. 7.

Array of PDMS fences, formed from a fluorinated PMMA mold. (The cracks visible on the high magnification image are in the Au discharge layer, which was sputtered on the top of the surface prior the scanning electron microscopy imaging.)

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/content/avs/journal/jvstb/26/6/10.1116/1.3013281
2008-12-01
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3013281
10.1116/1.3013281
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