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Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
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10.1116/1.3013281
    + View Affiliations - Hide Affiliations
    Affiliations:
    1 Department of Chemical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    2 Department of Mechanical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    3 IBM, T. J. Watson Research Center, Yorktown Heights, New York 10598
    4 Department of Mechanical Engineering, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    5 Department of Applied Physics and Applied Mathematics, Columbia University, New York, New York 10027 and The Nanotechnology Center for Mechanics in Regenerative Medicine, Columbia University, New York, New York 10027
    a) Electronic mail: sw2128@columbia.edu
    J. Vac. Sci. Technol. B 26, 2394 (2008); http://dx.doi.org/10.1116/1.3013281
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/content/avs/journal/jvstb/26/6/10.1116/1.3013281
2008-12-01
2014-12-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3013281
10.1116/1.3013281
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