1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication
Rent:
Rent this article for
USD
10.1116/1.3013368
/content/avs/journal/jvstb/26/6/10.1116/1.3013368
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3013368

Figures

Image of FIG. 1.
FIG. 1.

Optical dispersions ranging in wavelength from on Si and from on glass for sputtered FEP thin films and bulk FEP target material. The Cauchy fits are only reported over the range that the wavelengths were fitted as the fits change slightly with wider ranges, reflecting that the Cauchy fit is indeed a good approximation to a more complicated film structure. Refractive index for increasing thickness films (Run 1, Run 2, and Run 3) is plotted for (a) Si and (b) glass substrates. Absorption is plotted for all three runs on (c) Si.

Image of FIG. 2.
FIG. 2.

Roughness as measured with an AFM on the third deposited film on (a) BK7 and (b) Si.

Image of FIG. 3.
FIG. 3.

Three-dimensional model of the dual-mode surface-plasmon resonance sensor. The sensor is illuminated using total-internal reflection through a BK7 glass hemispherical prism. Two surface-plasmon modes are excited at different angles. This leads to a reflection spectrum with two minima whose angles are sensitive to both surface and bulk refractive index changes. An experimental dual-mode SPR sensor, illuminated with green light for illustrative purposes, is shown in the inset.

Image of FIG. 4.
FIG. 4.

Simulated transverse magnetic (TM) polarized reflectivity vs angle for an light introduced through a BK7 prism at angles ranging from 64° to 76°. The sensor surface is comprised of thick sputtered FEP and thick Au. Ethanol was used as analyte. The reflection minima correspond to long- and short- range surface plasmons, respectively.

Tables

Generic image for table
TABLE I.

Sputtered FEP film thicknesses and roughness. The ellipsometry thickness measurements agreed well with those from a Veeco Dektak profiler. Roughness was included in the ellipsometry analysis according to a realistic value found using an AFM (average peak to peak roughness). Locations where N/A is used mean that the roughness was negligible (much less than ), so was excluded from the ellipsometry fit. An thick layer was used in the model on all Si substrates.

Loading

Article metrics loading...

/content/avs/journal/jvstb/26/6/10.1116/1.3013368
2008-12-01
2014-04-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Optical properties of sputtered fluorinated ethylene propylene and its application to surface-plasmon resonance sensor fabrication
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3013368
10.1116/1.3013368
SEARCH_EXPAND_ITEM