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Exploration of etch step interactions in the dual patterning process for process modeling
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10.1116/1.3021377
/content/avs/journal/jvstb/26/6/10.1116/1.3021377
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3021377
/content/avs/journal/jvstb/26/6/10.1116/1.3021377
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/content/avs/journal/jvstb/26/6/10.1116/1.3021377
2008-12-01
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Exploration of etch step interactions in the dual patterning process for process modeling
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/26/6/10.1116/1.3021377
10.1116/1.3021377
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