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Fabrication strategies for filter banks based on microring resonators
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Device layout for frequency calibration experiments. The numbers inside the calibration filter rings denote their relative frequency mismatch. (b) Frequency dependence on changes in ring radius. (c) Frequency dependence on percent change in exposure dose.

Image of FIG. 2.
FIG. 2.

(a) Scanning-electron micrograph of waveguide cross-section with HSQ overcladding. (b) Transmission response and (c) top-view optical micrograph of twenty-channel second-order dual filter bank.

Image of FIG. 3.
FIG. 3.

Transmission response of a two-channel second-order microring-resonator filter bank. The second filter in the bank (the response on the left) had a frequency mismatch before tuning (dotted line) that was reduced to after tuning (solid line). The first filter in the bank (the response on the right) had a much smaller mismatch of before tuning that was reduced to after tuning (only the after tuning drop response is shown). The inset is an optical micrograph of the integrated titanium heaters located above the microrings.

Image of FIG. 4.
FIG. 4.

Temperature stability measurements of a microring-resonator filter in the presence of an external temperature perturbation when using a resistive temperature stability circuit in an open-loop (top) and closed-loop (bottom) setup.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication strategies for filter banks based on microring resonators