1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Gd silicate: A high- dielectric compatible with high temperature annealing
Rent:
Rent this article for
USD
10.1116/1.3025904
/content/avs/journal/jvstb/27/1/10.1116/1.3025904
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/1/10.1116/1.3025904

Figures

Image of FIG. 1.
FIG. 1.

MOS capacitors with on chemical oxide for different annealing conditions without RTA, after RTA at , and : (a) curves and (b) characteristics.

Image of FIG. 2.
FIG. 2.

MOS capacitors with on thermal oxide for different annealing conditions without RTA, after RTA at , and : (a) curves and (b) characteristics.

Image of FIG. 3.
FIG. 3.

Cross sectional TEM micrographs of MOS capacitors with TiN electrode and gate stack with on thermal oxide (a) without RTA and (b) after RTA at .

Image of FIG. 4.
FIG. 4.

MEIS Gd, Si, and O depth profiles for an (a) sample without RTA, (b) after RTA at , and (c) after RTA at .

Image of FIG. 5.
FIG. 5.

MOS capacitors initially with on thermal oxide: (a) breakdown measurements of capacitors with Gd silicate after RTA and (b) normalized capacitance characteristics for different annealing conditions measured in forward and backward directions at a frequency of .

Tables

Generic image for table
TABLE I.

Physical thicknesses of the /high- layers measured by MEIS and TEM and values of high- region corresponding to the TEM results.

Loading

Article metrics loading...

/content/avs/journal/jvstb/27/1/10.1116/1.3025904
2009-02-09
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Gd silicate: A high-k dielectric compatible with high temperature annealing
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/1/10.1116/1.3025904
10.1116/1.3025904
SEARCH_EXPAND_ITEM