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Thick membrane operated rf microelectromechanical system switch with low actuation voltage
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10.1116/1.3032916
/content/avs/journal/jvstb/27/1/10.1116/1.3032916
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/1/10.1116/1.3032916

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the proposed rf switch. (a) The 3D image of the proposed rf switch. (b) A top view of the bottom electrode and the back side view of the membrane. (c) 3D image of each layer. (d) area cross sectional view of the proposed rf switch.

Image of FIG. 2.
FIG. 2.

Simplified operating mode of the proposed rf MEMS switch. (a) The initial off state. (b) The on state. (c) The seesaw mode off state of the MEMS switch.

Image of FIG. 3.
FIG. 3.

rf simulated results of the purposed switch.

Image of FIG. 4.
FIG. 4.

Fabrication process for the proposed MEMS switch. (a) Signal line and electrodes formation. (b) Cavity formation. (c)Insulation layer formation. (d) Pivot and contact pad formation. (e) Glass and silicon wafer bonding. (f) Membrane formation.

Image of FIG. 5.
FIG. 5.

SEM image for the fabricated MEMS switch. (a) The side view of fabricated MEMS switch. (b) Detail view of MEMS switch.

Image of FIG. 6.
FIG. 6.

rf characteristics of the simulated and fabricated rf switch.

Tables

Generic image for table
TABLE I.

Fabrication parameters of the proposed rf switch.

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/content/avs/journal/jvstb/27/1/10.1116/1.3032916
2009-01-12
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thick membrane operated rf microelectromechanical system switch with low actuation voltage
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/1/10.1116/1.3032916
10.1116/1.3032916
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