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Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures
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10.1116/1.3046154
/content/avs/journal/jvstb/27/3/10.1116/1.3046154
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/3/10.1116/1.3046154
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of Linnik microscopic interferometer system.

Image of FIG. 2.
FIG. 2.

Photograph of Linnik microscopic interferometer system.

Image of FIG. 3.
FIG. 3.

One interferogram of the step height standard by Linnik microscopic interferometer.

Image of FIG. 4.
FIG. 4.

Wrapped phase image of the step height standard by Linnik microscopic interferometer.

Image of FIG. 5.
FIG. 5.

3D surface profile of the step height standard by Linnik microscopic interferometer.

Image of FIG. 6.
FIG. 6.

One interferogram of the step height standard by Mirau microscopic interferometer.

Image of FIG. 7.
FIG. 7.

3D surface profile of the step height standard by Mirau microscopic interferometer.

Image of FIG. 8.
FIG. 8.

Fitting image of the surface profile of a standard plane.

Image of FIG. 9.
FIG. 9.

Corrected surface profile of the step height standard.

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/content/avs/journal/jvstb/27/3/10.1116/1.3046154
2009-05-27
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Long-working-distance Linnik microscopic interferometry for measuring the surface profile of microstructures
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/3/10.1116/1.3046154
10.1116/1.3046154
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