(Color online) Calculated [SRIM (Ref. 7)] spatial distribution of the implanted zinc ions.
(Color online) measurements (, ) and space charge region width. In the gray regions Schottky’s approximation is invalid due to a significant current. Top: Zn-implanted sample. Bottom: reference sample.
(Color online) Spatial distribution of the net-doping concentration determined from measurements.
(Color online) TAS measurements with ; bottom: reference sample; top: Zn-implanted sample.
(Color online) DLTS spectra of the reference (bottom) and the Zn-implanted (top) sample. The used rate window was and the filling pulse amounts to . The inset depicts the T2/E3 DLTS peak height ratio of the Zn-implanted sample in dependence of the space charge region width.
Arrhenius plot of the deep levels T2 and E3 obtained from DLTS.
(Color online) Near band edge photoluminescense spectra.
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