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Defects in zinc-implanted ZnO thin films
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10.1116/1.3086659
/content/avs/journal/jvstb/27/3/10.1116/1.3086659
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/3/10.1116/1.3086659

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Calculated [SRIM (Ref. 7)] spatial distribution of the implanted zinc ions.

Image of FIG. 2.
FIG. 2.

(Color online) measurements (, ) and space charge region width. In the gray regions Schottky’s approximation is invalid due to a significant current. Top: Zn-implanted sample. Bottom: reference sample.

Image of FIG. 3.
FIG. 3.

(Color online) Spatial distribution of the net-doping concentration determined from measurements.

Image of FIG. 4.
FIG. 4.

(Color online) TAS measurements with ; bottom: reference sample; top: Zn-implanted sample.

Image of FIG. 5.
FIG. 5.

(Color online) DLTS spectra of the reference (bottom) and the Zn-implanted (top) sample. The used rate window was and the filling pulse amounts to . The inset depicts the T2/E3 DLTS peak height ratio of the Zn-implanted sample in dependence of the space charge region width.

Image of FIG. 6.
FIG. 6.

Arrhenius plot of the deep levels T2 and E3 obtained from DLTS.

Image of FIG. 7.
FIG. 7.

(Color online) Near band edge photoluminescense spectra.

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/content/avs/journal/jvstb/27/3/10.1116/1.3086659
2009-05-28
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Defects in zinc-implanted ZnO thin films
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/3/10.1116/1.3086659
10.1116/1.3086659
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