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Laser micromachining of optical microstructures with inclined sidewall profile
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Schematic of laser micromachining setup.

Image of FIG. 2.
FIG. 2.

(Color online) Cross-sectional optical microphotograph of laser micromachined microtrenches at an inclination of at a range of scan cycles of between 1 and 10.

Image of FIG. 3.
FIG. 3.

Depth of microtrenches as a function of scan cycles for beam incident angles of 45° and 60°.

Image of FIG. 4.
FIG. 4.

(Color online) (a) Cross-sectional optical image showing an intersecting vertical (3 cycles) and an oblique cut (, 5 cycles) on sapphire. (b) FE-SEM image showing the 3D view of the structure in (a), with the triangular column removed.

Image of FIG. 5.
FIG. 5.

(Color online) Laser micromachined conic section in (a) plan view and (b) 3D view.

Image of FIG. 6.
FIG. 6.

(Color online) (a) Surface optical microphotograph of a laser-patterned sapphire sample prior to cleaning treatment. (b) The same sample after a cleaning process of soaking in 18% HCl solution for 5 min, followed with 20 s of sonication.

Image of FIG. 7.
FIG. 7.

(Color online) AFM morphology images of the inclined sapphire surfaces after laser micromachining for (a) 2 cycles and (b) 5 cycles. The corresponding rms roughnesses are 150 and 218 nm, respectively.

Image of FIG. 8.
FIG. 8.

Low and high magnification FE-SEM images of the inclined micromachined surfaces after [(a) and (b)] 2 cycles, [(c) and (d)] 5 cycles. and [(e) and (f)] 10 cycles.


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Scitation: Laser micromachining of optical microstructures with inclined sidewall profile