Laser micromachining of optical microstructures with inclined sidewall profile
(Color online) Schematic of laser micromachining setup.
(Color online) Cross-sectional optical microphotograph of laser micromachined microtrenches at an inclination of at a range of scan cycles of between 1 and 10.
Depth of microtrenches as a function of scan cycles for beam incident angles of 45° and 60°.
(Color online) (a) Cross-sectional optical image showing an intersecting vertical (3 cycles) and an oblique cut (, 5 cycles) on sapphire. (b) FE-SEM image showing the 3D view of the structure in (a), with the triangular column removed.
(Color online) Laser micromachined conic section in (a) plan view and (b) 3D view.
(Color online) (a) Surface optical microphotograph of a laser-patterned sapphire sample prior to cleaning treatment. (b) The same sample after a cleaning process of soaking in 18% HCl solution for 5 min, followed with 20 s of sonication.
(Color online) AFM morphology images of the inclined sapphire surfaces after laser micromachining for (a) 2 cycles and (b) 5 cycles. The corresponding rms roughnesses are 150 and 218 nm, respectively.
Low and high magnification FE-SEM images of the inclined micromachined surfaces after [(a) and (b)] 2 cycles, [(c) and (d)] 5 cycles. and [(e) and (f)] 10 cycles.
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