Fabrication of crystalline Si spheres with atomic-scale surface smoothness using homogenized KrF excimer laser reformation system
Diagram of the homogenized KrF excimer laser reformation system.
Flowchart of the fabrication process.
tilted SEM images of the samples after RIE etching. The diameters of the Si rods are (a) , (b) , (c) , (d) , (e) , (f) , (g) , and (h) .
SEM images of Si structures after excimer laser reformation. (a)–(h) are corresponding structures to Fig. 3.
, tilted SEM images in the spherical case: (a) before illumination and (b) after illumination.
(a) AFM image of the fabricated Si sphere and (b) the cross section of the area near the top of the sphere [the cross section of the solid line in (a)].
TEM image of the fabricated Si sphere. The insert figure is the TEM profile of the detected sphere.
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