Dry etch selectivity of hardmasks for sub- patterning applications
Correlation between density of film and etch selectivity to PE TEOS oxide.
(a) FTIR spectra comparison of peaks for (HT) and (LT) samples. (b) FTIR spectra comparison of peaks for (HT) , (LT) , and (MT) samples.
carbon contents and extinction coefficients of the samples.
Summary of aggregate bond energy and etch selectivity of the samples.
Summary of material properties and etch selectivity to PE TEOS oxide.
Bond energy calculations for the different films.
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