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Lift-off process using bilayer ultraviolet nanoimprint lithography and methacryloxypropyl-terminated-polydimethylsiloxane-based imprint resin
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10.1116/1.3156739
/content/avs/journal/jvstb/27/4/10.1116/1.3156739
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/4/10.1116/1.3156739
/content/avs/journal/jvstb/27/4/10.1116/1.3156739
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/content/avs/journal/jvstb/27/4/10.1116/1.3156739
2009-06-24
2014-11-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Lift-off process using bilayer ultraviolet nanoimprint lithography and methacryloxypropyl-terminated-polydimethylsiloxane-based imprint resin
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/4/10.1116/1.3156739
10.1116/1.3156739
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