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Effect of sidewall passivation in inductively coupled plasma etching of two-dimensional GaAs photonic crystals
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10.1116/1.3205004
/content/avs/journal/jvstb/27/5/10.1116/1.3205004
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3205004
/content/avs/journal/jvstb/27/5/10.1116/1.3205004
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/content/avs/journal/jvstb/27/5/10.1116/1.3205004
2009-08-28
2014-08-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of sidewall passivation in BCl3∕N2 inductively coupled plasma etching of two-dimensional GaAs photonic crystals
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3205004
10.1116/1.3205004
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