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Effect of liquid dispensing on flow field for immersion lithography
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10.1116/1.3212916
/content/avs/journal/jvstb/27/5/10.1116/1.3212916
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3212916

Figures

Image of FIG. 1.
FIG. 1.

Sketch of the experimental setup.

Image of FIG. 2.
FIG. 2.

Schematic of the immersion unit.

Image of FIG. 3.
FIG. 3.

Immersion unit prototype.

Image of FIG. 4.
FIG. 4.

Schematic of the CFD model used to investigate the normal and shear forces on the lens.

Image of FIG. 5.
FIG. 5.

Flow field stream patterns for varying dispense port quantity. (a) Stream patterns of one dispense port. (b) Stream patterns of two dispense ports. (c) Stream patterns of three dispense ports. (d) Stream patterns of four dispense ports by CFD simulation.

Image of FIG. 6.
FIG. 6.

Flow field filled status with wafer motion of . (a) Liquid injection with only one dispense port. (b) Liquid injection with two symmetrical dispense ports.

Image of FIG. 7.
FIG. 7.

Flow field renovating cycle time for varying dispense port quantity.

Image of FIG. 8.
FIG. 8.

(a) shows the velocity magnitude as a function of lens center distance for varying injecting velocity. (b) shows the velocity magnitude as a function of lens center distance for varying dispense port quantity. (c) shows the velocity magnitude as a function of lens center distance for varying injecting angle.

Image of FIG. 9.
FIG. 9.

Random sample point velocity distribution as a function of point’s center distance beneath the lens area with varying liquid injection speed.

Image of FIG. 10.
FIG. 10.

Normal pressure distribution on lens for varying injecting velocity.

Image of FIG. 11.
FIG. 11.

Normal pressure distribution on lens for varying dispense port quantity.

Image of FIG. 12.
FIG. 12.

Normal pressure distribution on lens for varying injecting angle.

Image of FIG. 13.
FIG. 13.

Shear pressure distribution on lens for varying injecting velocity.

Image of FIG. 14.
FIG. 14.

Shear pressure distribution on lens for varying dispense port quantity.

Image of FIG. 15.
FIG. 15.

Shear pressure distribution on lens for varying injecting angle.

Tables

Generic image for table
TABLE I.

Input parameters and material properties for numerical models.

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/content/avs/journal/jvstb/27/5/10.1116/1.3212916
2009-08-31
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of liquid dispensing on flow field for immersion lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3212916
10.1116/1.3212916
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