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Nanoimprint mold fabrication and duplication for embedded servo and discrete track recording media
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10.1116/1.3225597
/content/avs/journal/jvstb/27/5/10.1116/1.3225597
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3225597
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Two-step EBL writing process for the formation of dot arrays.

Image of FIG. 2.
FIG. 2.

(a) Transferring the pattern from the master mold onto the IPS through hot embossing and (b) process flow for fabrication of daughter mold.

Image of FIG. 3.
FIG. 3.

(a) CAD images of DTR patterns drawn using the autogeneration program. (b) Optical image of a segment on the master mold showing two servo patterns and the tracks in between.

Image of FIG. 4.
FIG. 4.

Comparison SEM images of 120 nm track pitch master mold (top row) and daughter mold (bottom row): (a) preamble, (b) servo coding area, (c) burst area, and (d) closeup of burst area.

Image of FIG. 5.
FIG. 5.

100 nm track pitch master mold SEM images of (a) preamble and data tracks and (b) closeup of servo and data track transition.

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/content/avs/journal/jvstb/27/5/10.1116/1.3225597
2009-09-22
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanoimprint mold fabrication and duplication for embedded servo and discrete track recording media
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/5/10.1116/1.3225597
10.1116/1.3225597
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