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Coherent diffraction lithography: Periodic patterns via mask-based interference lithography
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10.1116/1.3237093
/content/avs/journal/jvstb/27/6/10.1116/1.3237093
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3237093
/content/avs/journal/jvstb/27/6/10.1116/1.3237093
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/content/avs/journal/jvstb/27/6/10.1116/1.3237093
2009-12-03
2014-08-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Coherent diffraction lithography: Periodic patterns via mask-based interference lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3237093
10.1116/1.3237093
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