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Thermal development of a calixarene resist
(Color online) Plot showing the results of the thermo gravimetric analysis (TGA) of unexposed TEBN-1 calixarene.
(Color online) Contrast curves of calixarene developed thermally on a hot plate at 250, 300, and 400 °C for 15 s in air and 300 °C at 0.1 mbar for 660 s in comparison to standard development in IPA.
Thickness of electron beam exposed calixarene developed in conventional IPA developer and thermally at 250–500 °C.
Isolated and dense line patterns written with electron beam. [(a) and (c)] Developed in IPA for 30 s and [(b)–(e)] developed thermally at 300 °C for 15 s.
box patterns developed (a) in IPA for 30 s and (b) thermally at 400 °C for 15 s. The dose is increasing in the top row from left to right, in the bottom row from the right to the left, with the step of .
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