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Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition
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10.1116/1.3242693
/content/avs/journal/jvstb/27/6/10.1116/1.3242693
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3242693
/content/avs/journal/jvstb/27/6/10.1116/1.3242693
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/content/avs/journal/jvstb/27/6/10.1116/1.3242693
2009-12-02
2014-07-14
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion multibeam nanopatterning for photonic applications: Experiments and simulations, including study of precursor gas induced etching and deposition
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3242693
10.1116/1.3242693
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