(a) Schematic diagram of the procedure for ITO direct patterning using nanoimprint lithography with ITO NP solution. (b) Detailed imprinting process flow with ITO NP solution.
Resistivity of the blanket ITO thin film, derived from ITO NP solution, as a function of the annealing temperature.
Schematic diagram of (a) the conventional ITO glass and (b) the directly patterned ITO layer/ITO glass for enhancing the transmittance using periodic nanopatterns.
(a) SEM and (b) AFM images of the directly patterned ITO layer on the substrate.
Transmittance spectra of the ITO glass and ITO NP patterns on ITO glass, (a) Transmittance of pre- and postannealed ITO glass, (b) transmittance of pre- and postannealed ITO NP patterns on ITO glass, and (c) transmittance compared to the preannealed ITO glass and postannealed ITO NP patterns on the ITO glass.
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