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Focused-ion beam fabrication of nanometer orifices for leak detection
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10.1116/1.3243229
/content/avs/journal/jvstb/27/6/10.1116/1.3243229
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3243229
/content/avs/journal/jvstb/27/6/10.1116/1.3243229
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/content/avs/journal/jvstb/27/6/10.1116/1.3243229
2009-10-30
2014-07-13
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Focused-ion beam fabrication of nanometer orifices for leak detection
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3243229
10.1116/1.3243229
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