Schematic structure of the DFB LD (a) and its epitaxial layers (b).
Fabrication process of the gratings.
Scanning electron microscopy image of diffraction gratings.
(Color online) Atomic force microscopy image of diffraction gratings. The line profile shows a cross section of the gratings.
(Color online) PL intensities of the epitaxial layers after imprinting. The field size of imprinting is .
(Color online) Distributions of stress without (a) and with (b) liquid between molds and substrates.
Supplied current vs optical output and slope efficiency.
Oscillation spectrum of a phase-shifted LD.
Histograms of SSR for phase-shifted LDs fabricated by NIL and by EBL. The standard deviations of SSR for LDs fabricated by NIL and by EBL are almost the same, 2.0 and 1.8, respectively.
Histograms of SSR for phase-shifted LDs and uniform-grating LDs fabricated by NIL. The standard deviations of SSR for phase-shifted LDs and uniform-grating LDs are 2.0 and 2.5, respectively.
Time-dependent change in threshold current of phase-shifted DFB LDs with the output power of 10 mW at the ambient temperature of .
Mechanical properties used for simulation.
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