Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography
Chemical structures of Optool DSX (a), , and FLUOROLINK® S10 (b), , , and .
Surface energy of silica templates treated with Optool DSX (solid curve) and FLUOROLINK® S10 (dotted curve) when newly treated and after several imprints.
Carbon XPS spectrum of a fused silica mold newly treated with FLUOROLINK® S10 (solid curve) along with all the fitted bonding contributions (dashed curves).
Carbon XPS spectra of a fused silica mold treated with FLUOROLINK® S10 before imprint (solid curve), after 10 imprints (dashed curve) and after 40 imprints (dotted curve). Arrows indicate the positions of the different bonding contributions.
ESR spectra of resist and silica beads mixture irradiated for untreated beads (solid curve), Optool DSX treated beads (dashed curve), and FLUOROLINK® S10 treated beads (dotted curve).
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