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Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography
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10.1116/1.3245993
/content/avs/journal/jvstb/27/6/10.1116/1.3245993
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3245993
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Chemical structures of Optool DSX (a), , and FLUOROLINK® S10 (b), , , and .

Image of FIG. 2.
FIG. 2.

Surface energy of silica templates treated with Optool DSX (solid curve) and FLUOROLINK® S10 (dotted curve) when newly treated and after several imprints.

Image of FIG. 3.
FIG. 3.

Carbon XPS spectrum of a fused silica mold newly treated with FLUOROLINK® S10 (solid curve) along with all the fitted bonding contributions (dashed curves).

Image of FIG. 4.
FIG. 4.

Carbon XPS spectra of a fused silica mold treated with FLUOROLINK® S10 before imprint (solid curve), after 10 imprints (dashed curve) and after 40 imprints (dotted curve). Arrows indicate the positions of the different bonding contributions.

Image of FIG. 5.
FIG. 5.

ESR spectra of resist and silica beads mixture irradiated for untreated beads (solid curve), Optool DSX treated beads (dashed curve), and FLUOROLINK® S10 treated beads (dotted curve).

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/content/avs/journal/jvstb/27/6/10.1116/1.3245993
2009-12-03
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3245993
10.1116/1.3245993
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