Ultrathin fluorinated diamondlike carbon coating for nanoimprint lithography imprinters
Patterns generated using EBL with approximately diameter dots separated by approximately from each other.
Patterns generated were sets of squares with the dot pattern shown above in this SEM image.
DLC thickness as a function of deposition time. Forward power: , Bias power: . Pressure: . Flow rates: 3:1 .
Imprinter with an ultrathin layer of DLC imaged at a 45° angle. Five pillars have been outlined to aid in viewing the image.
Contact angle in degrees as a function of the DLC thickness.
on Si imprinter with ultrathin DLC and F-DLC processing steps.
Imprinted sample without the F-DLC antistick coating on the imprinter. There are features from the imprinter left on the imprinted sample.
Contact angle of D1 water after each deposition stage.
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