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Ultrathin fluorinated diamondlike carbon coating for nanoimprint lithography imprinters
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10.1116/1.3250258
/content/avs/journal/jvstb/27/6/10.1116/1.3250258
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3250258

Figures

Image of FIG. 1.
FIG. 1.

Patterns generated using EBL with approximately diameter dots separated by approximately from each other.

Image of FIG. 2.
FIG. 2.

Patterns generated were sets of squares with the dot pattern shown above in this SEM image.

Image of FIG. 3.
FIG. 3.

DLC thickness as a function of deposition time. Forward power: , Bias power: . Pressure: . Flow rates: 3:1 .

Image of FIG. 4.
FIG. 4.

Imprinter with an ultrathin layer of DLC imaged at a 45° angle. Five pillars have been outlined to aid in viewing the image.

Image of FIG. 5.
FIG. 5.

Contact angle in degrees as a function of the DLC thickness.

Image of FIG. 7.
FIG. 7.

on Si imprinter with ultrathin DLC and F-DLC processing steps.

Image of FIG. 6.
FIG. 6.

Imprinted sample without the F-DLC antistick coating on the imprinter. There are features from the imprinter left on the imprinted sample.

Tables

Generic image for table
TABLE I.

Contact angle of D1 water after each deposition stage.

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/content/avs/journal/jvstb/27/6/10.1116/1.3250258
2009-12-03
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ultrathin fluorinated diamondlike carbon coating for nanoimprint lithography imprinters
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3250258
10.1116/1.3250258
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