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Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production
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10.1116/1.3253544
/content/avs/journal/jvstb/27/6/10.1116/1.3253544
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3253544
/content/avs/journal/jvstb/27/6/10.1116/1.3253544
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/content/avs/journal/jvstb/27/6/10.1116/1.3253544
2009-12-01
2014-08-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3253544
10.1116/1.3253544
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