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Talbot lithography: Self-imaging of complex structures
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Talbot effect: First experimental results in soft x rays (EUV). The mask (first to the left) creates images at the Talbot planes [atomic force microscope (AFM) images of actual exposures]. The size of the images shown here is , the individual lines being and ; only a small area of the mask and exposed patterns is shown for illustrative purposes. Notice the excellent quality of the images at the Talbot planes.

Image of FIG. 2.
FIG. 2.

(Color online) Talbot “carpet,” depicting the intensity of the radiation (impinging from the top) along the propagation direction. The left panel shows the case of a simple grating, the right panel that of a more complex object. Notice the self-images at the locations (Talbot effect); laterally displaced self-images are observed at the half-integer positions. However, for the GTI case, no fractional pattern is observed. The figures below the carpets show the intensity profile (cut lines) at the Talbot planes; the similarity is remarkable, although difficult to visualize on the scale of the figure.

Image of FIG. 3.
FIG. 3.

(Color online) Optical microscope images of the GTI mask.

Image of FIG. 4.
FIG. 4.

(Color online) Digital charge-coupled device (CCD) camera recorded images of Talbot imaging at first , second , and third Talbot planes using He–Ne laser light. Notice the ringing due to the highly coherent imaging conditions.

Image of FIG. 5.
FIG. 5.

AFM images of test patterns recorded at several Talbot planes in thick PMMA.

Image of FIG. 6.
FIG. 6.

(Color online) AFM images of test patterns rotated by 45° recorded at the first EUV Talbot plane in thick PMMA.

Image of FIG. 7.
FIG. 7.

(Color online) AFM scan of Talbot imaging on the sixth plane. The sixth Talbot distance is , and the pattern is still imaged faithfully.


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Scitation: Talbot lithography: Self-imaging of complex structures