(Color online) Conceptual diagram of the nanoporous microcontainer: (a) the hollowed cuboid base and the nanoporous lid before (left panel) and after assembly (right panel), and (b) the nanoporous lid as seen from above, with a magnified depiction of a well that exposes the thin nanoporous membrane under it.
(Color) Fabrication process of the hollowed cuboid base: (a) spin coating of thick SU-8, (b) patterning of the bottom face, (c) spin coating of thick SU-8, and (d) patterning of the four sidewalls.
(Color) Fabrication process of the Si mold for nanoimprint process: (a) imprinted SU-8, (b) transfer of pattern to by fluorine ICP etch, (c) transfer of pattern to Si by chlorine ICP etch; (d) repeated oxidation and oxide removal by BOE, and (e) final Si mold.
SEM micrographs showing (a) the Si grating after the second oxidation and oxide etch step and (b) the final Si grating (after all oxidation and oxide etch steps) with wide Si lines that is used to make the nanoslots.
(Color) Fabrication process of the nanoporous lid: (a) spin coating of SU-8, (b) nanoimprinting with a Si mold, (c) imprinted SU-8 membrane, (d) oxygen plasma etching of SU-8 after oblique-angle metal deposition, (e) S1813 patterning and oxygen plasma etching for the formation of nanoporous lids, (f) spin coating of thick SU-8, and (g) patterning of circular trench array.
(Color online) SEM image showing cross section of the nanotrenches in SU-8. The topmost nanoslot opening is as narrow as .
(Color) SEM images showing (a) the SU-8 hollowed cuboid base and (b) the nanoporous microcontainer lid (modified with permission from Ref. 18). (c) Encapsulated islet shows uptake of the molecular dye FM 4-64, suggesting adequate device porosity for the transport of nutrients, secretagogues, and hormones necessary for cell survival and function.
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