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Stitching periodic submicron fringes by utilizing step-and-align interference lithography
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10.1116/1.3258152
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    Affiliations:
    1 Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, Photonics and Nano-Structure Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    2 Department of Mechanical Engineering, Precision System Control Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    3 Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, Photonics and Nano-Structure Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    4 Department of Mechanical Engineering, Precision System Control Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    5 Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, Photonics and Nano-Structure Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    6 Department of Mechanical Engineering, Precision System Control Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    7 Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, Photonics and Nano-Structure Laboratory, National Taiwan University, Taipei, Taiwan 10617, Republic of China
    a) Electronic mail: lon@ntu.edu.tw
    J. Vac. Sci. Technol. B 27, 2951 (2009); http://dx.doi.org/10.1116/1.3258152
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/content/avs/journal/jvstb/27/6/10.1116/1.3258152
2009-12-03
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stitching periodic submicron fringes by utilizing step-and-align interference lithography
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3258152
10.1116/1.3258152
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