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Understanding imaging modes in the helium ion microscope
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10.1116/1.3258634
/content/avs/journal/jvstb/27/6/10.1116/1.3258634
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3258634
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

CASINO modeling of the origin of BSE in silicon due to a primary electron beam.

Image of FIG. 2.
FIG. 2.

Images of the Pt surface at grain boundaries. Left: XHR SEM. Right: HIM.

Image of FIG. 3.
FIG. 3.

Image gray level from 36 elemental test samples measured in HIM, SE mode. The beam energy was . The equation displays the result of a linear fit to the data.

Image of FIG. 4.
FIG. 4.

Images comparing contrast levels. Top row, left to right: CHO cells and a DRAM cross section imaged by HIM. Bottom row: the same samples, imaged by SEM.

Image of FIG. 5.
FIG. 5.

Voltage contrast imaging of fully processed integrated circuit device with a coating. Left: SEM. Right: HIM.

Image of FIG. 6.
FIG. 6.

SE spectra generated by SEM (data from Ref. 8) and by HIM.

Image of FIG. 7.
FIG. 7.

Images of iron phosphate on porous silica. Left: BSE image from SEM, coated sample. Right: HIM image from uncoated sample.

Image of FIG. 8.
FIG. 8.

Experimental (dots) and calculated (line) helium backscatter data for the elements. The primary beam energy was .

Image of FIG. 9.
FIG. 9.

SE (left) and RBI (right) HIM images of a solder joint.

Image of FIG. 10.
FIG. 10.

TRIM computed trajectories for He ions backscattered from Cu. Scale is in angstroms. (a) Scaled to show complete path of backscattered particles. (b) Plot of smaller region at beam impact point (note the compressed scale). Lines: backscattered He; points: implanted He.

Image of FIG. 11.
FIG. 11.

Images captured from combination detector. (a) Top-side SE, (b) bright field, (c) bottom-side SE, and (d) dark field.

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/content/avs/journal/jvstb/27/6/10.1116/1.3258634
2009-12-14
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Understanding imaging modes in the helium ion microscope
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3258634
10.1116/1.3258634
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