Schematic of a tubular gas doser showing key dimensions.
(Color) Gas flux from a simple orifice-type doser (, ).
Axial velocity (a) and temperature (b) profiles from a simple orifice-type doser (, ).
(Color) Scaled flux distributions from (a) dosers operated at small , where the curve colors indicate various combinations of design, , flowrate, , and values (analytical and DSMC results for an effusive emitter also shown); (b) capillary-type dosers for a range of values.
Gas flux distributions from microcapillary arrays for small (a) and large (b) distance to diameter ratios.
Features of advanced gas doser designs; (a) a curved MCA that focuses the flux from many capillaries and (b) an arrangement of nine small MCAs individually aimed at the target.
Scaled gas flux from a single capillary compared to that from a small MCA (, , ).
(Color) Gas flux distribution from a focused capillary-type doser (, ).
Gas flux distributions over a wafer area from various gas dosers with (a) 45° approach angle and distance access constraints; (b) an orifice doser with , (c) nine flat MCAs with , a focused MCA with 26523 capillaries, and .
Experimental results for the dose required to saturate a silicon surface using disilane.
Comparison of the flow rate required to give a flux of from various dosers and the resulting chamber pressure assuming a pump speed of .
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