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Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups
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10.1116/1.3264672
/content/avs/journal/jvstb/27/6/10.1116/1.3264672
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3264672
/content/avs/journal/jvstb/27/6/10.1116/1.3264672
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/content/avs/journal/jvstb/27/6/10.1116/1.3264672
2009-12-04
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3264672
10.1116/1.3264672
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