Chemical structures of 2-Ep and 2-Ox.
DUV contrast curves for 2-Ep and 2-Ox at different PEB temperatures at a constant time of followed by development in MIBK.
Diagram demonstrating differences in polymerization and network formation in epoxide and oxetane resists: (a) epoxide initiation, (b) epoxide propagation, (c) epoxide network, (d) oxetane initiation, (e) oxetane propagation, and (f) oxetane network. Points in (b), (c), (e), and (f) are nonpolymerized molecules and are omitted in (a) and (d) for clarity.
SEM of e-beam patterning of 2-Ep with a PEB of (a) 1:1 line/space, (b) 1:1 line/space, (c) 1:1 line/space, and (d) 1:2 line/space.
SEM of e-beam patterning of 2-Ox with a PEB of : (a) 1:1 line/space, (b) 1:1 line/space, (c) 1:1 line/space, and (d) 1:1 line/space.
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