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Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups
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10.1116/1.3264672
/content/avs/journal/jvstb/27/6/10.1116/1.3264672
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3264672
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Chemical structures of 2-Ep and 2-Ox.

Image of FIG. 2.
FIG. 2.

DUV contrast curves for 2-Ep and 2-Ox at different PEB temperatures at a constant time of followed by development in MIBK.

Image of FIG. 3.
FIG. 3.

Diagram demonstrating differences in polymerization and network formation in epoxide and oxetane resists: (a) epoxide initiation, (b) epoxide propagation, (c) epoxide network, (d) oxetane initiation, (e) oxetane propagation, and (f) oxetane network. Points in (b), (c), (e), and (f) are nonpolymerized molecules and are omitted in (a) and (d) for clarity.

Image of FIG. 4.
FIG. 4.

SEM of e-beam patterning of 2-Ep with a PEB of (a) 1:1 line/space, (b) 1:1 line/space, (c) 1:1 line/space, and (d) 1:2 line/space.

Image of FIG. 5.
FIG. 5.

SEM of e-beam patterning of 2-Ox with a PEB of : (a) 1:1 line/space, (b) 1:1 line/space, (c) 1:1 line/space, and (d) 1:1 line/space.

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/content/avs/journal/jvstb/27/6/10.1116/1.3264672
2009-12-04
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Negative tone molecular resists using cationic polymerization: Comparison of epoxide and oxetane functional groups
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/27/6/10.1116/1.3264672
10.1116/1.3264672
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