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Sensitivity study of micro four-point probe measurements on small samples
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10.1116/1.3224889
/content/avs/journal/jvstb/28/1/10.1116/1.3224889
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/1/10.1116/1.3224889
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A, B, and C configurations used in the four-point probe measurement. Each pair of these (A and B or A and C) can be used to calculate the dual configuration sheet resistance with van der Pauw method. With the current and the potential pins interchanged, the , , and configurations are, respectively, realized.

Image of FIG. 2.
FIG. 2.

(Color online) Sensitivity of the measured four-point probe resistance to local sheet resistance variations for single configuration measurements of (a) , (b) , and (c) , respectively, on an infinite sample. The singular peaks have been truncated to show the smaller values around the probes clearly.

Image of FIG. 3.
FIG. 3.

(Color online) Sensitivity of dual configuration sheet resistance measurements to local sheet resistance variations for (a) part of an infinite film, (b) a circular sample with diameter of , (c) a square sample with side length of , and (d) a rectangular sample with width of and length of . The bold lines indicate the sensitivity value of 0.1, and the black full circles indicate the contact positions. A closeup view of the area around one of the inner probes from (c) is shown in (e). All the , positions are normalized with probe spacing .

Image of FIG. 4.
FIG. 4.

(Color online) Sensitivities of the measured sheet resistance in a micro Hall effect measurement to variations in (a) local sheet carrier density and (b) local carrier mobility. The bold lines indicate the sensitivity value of , and the black full circles indicate the contact positions. All the , positions are normalized with probe spacing .

Image of FIG. 5.
FIG. 5.

(Color online) Sensitivities of the measured Hall sheet resistance in a micro Hall effect measurement to (a) local sheet carrier density and (b) local carrier mobility. The bold lines indicate the sensitivity values of , and the black full circles indicate the contact positions. All the , positions are normalized with probe spacing .

Image of FIG. 6.
FIG. 6.

(Color online) Sensitivities of in a micro Hall effect measurement to (a) local sheet carrier density and (b) local carrier mobility. The bold lines indicate the sensitivity values of , and the black full circles indicate the contact positions. All the , positions are normalized with probe spacing .

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/content/avs/journal/jvstb/28/1/10.1116/1.3224889
2010-03-01
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sensitivity study of micro four-point probe measurements on small samples
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/1/10.1116/1.3224889
10.1116/1.3224889
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