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Graphoepitaxy of block copolymers using selectively removable templates
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Image of FIG. 1.
FIG. 1.

(a) Schematic depicting the processing overview for selectively removable template fabrication and graphoepitaxy of sphere forming block copolymers. The starting five-layer stack is exposed using IL to create a grating. This grating is then transferred by a series of reactive ion etching steps to create a template in the lower polymer layer. Next, a solution of the block copolymer is spin cast and annealed to induce microphase segregation. A final RIE step removes the majority block while simultaneously removing the polymer template. [(b)–(f)] Scanning electron micrograph of the guided assembly of PS-PFS in selectively removable templates: (b) In grooves 180 nm wide, 7 rows of PFS domains form; (c) in 370 nm wide grooves, 14 rows of PFS domains form; (d) image analysis used to extract positions of PFS domains and the edge contour of the template; (e) fast Fourier transform of image in (b); (f) pattern transfer of the block copolymer pattern into the oxide. Freestanding oxide pillars have been formed.

Image of FIG. 2.
FIG. 2.

Well-ordered array of tungsten islands with 17 nm diameter formed by pattern transfer from ordered block copolymer patterns templated with selectively removable templates.

Image of FIG. 3.
FIG. 3.

(a) Positions of PFS spheres are represented with dots and the solid line is the edge contour of the template. The values posted to the side are the average residuals for the linear fit, representing the average misplacement of a polymer domain, and , the line edge roughness of the template. Each row profile was fitted as a linear combination of the upper and lower edge contours, and the inset shows the fraction of a best linear fitting of the upper edge (adjacent to row 7) and 1- of the lower edge (adjacent to row 1) for each row profile. (b) For the same sample, the domain displacement from an ideal hexagonal lattice is represented by vectors which have been magnified two times with respect to the axes for clarity.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Graphoepitaxy of block copolymers using selectively removable templates