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Direct thermal-UV nanoimprint of an iron-containing organometallic hybrid film
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10.1116/1.3271337
/content/avs/journal/jvstb/28/1/10.1116/1.3271337
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/1/10.1116/1.3271337

Figures

Image of FIG. 1.
FIG. 1.

Hybrid film nanoimprinting process. (a) Spinning hybrid film solution on silicon wafer. (b) Thermal imprinting mold on hybrid film. (c) UV irradiation. (d) Mold release. (e) plasma film treatment. (f) Final nanoimprinted features.

Image of FIG. 2.
FIG. 2.

Nanoimprinting hybrid film. (A) wide lines that are in pitch are observed on the NIL mold. (B) These nano features are replicated into a sample coated with the hybrid film.

Image of FIG. 3.
FIG. 3.

Hybrid film EDX analysis after spin coating onto the substrate.

Image of FIG. 4.
FIG. 4.

Hybrid film thermal stability with directly imprinted samples (blue) and after UV and oxygen plasma treatment (red). All data points represent sample measurements.

Tables

Generic image for table
TABLE I.

Data showing the thickness of the film in control untreated samples and after UV and plasma etching treatment.

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/content/avs/journal/jvstb/28/1/10.1116/1.3271337
2010-01-11
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct thermal-UV nanoimprint of an iron-containing organometallic hybrid film
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/1/10.1116/1.3271337
10.1116/1.3271337
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