GIXRD spectra of the samples deposited at (a) 0.05 Pa and (b) 1.0 Pa.
SEM micrographs of the sample deposited at . The white marks correspond to .
(Color online) XRR spectra of the samples deposited at (a) 0.05 Pa and (b) 1.0 Pa.
Arrhenius plots of vs . From the best fit of the experimental points, the energy gap values were calculated for films deposited at different oxygen pressures: (1) : ; (2) : ; (3) : ; (4) : .
(Color online) Plot of vs for films deposited on substrates at different oxygen pressures.
Relative electrical resistance of the film deposited at vs 0.1% NO gas mixture pressure at 290 K.
Thickness and mean composition of the RPLD deposited samples, obtained from RBS spectra, electric energy gap , determined by specific conductivity measurements with an applied electric field of 45 V/m and thermo-emf coefficient .
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