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Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption
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10.1116/1.3425632
/content/avs/journal/jvstb/28/3/10.1116/1.3425632
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/3/10.1116/1.3425632
/content/avs/journal/jvstb/28/3/10.1116/1.3425632
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/content/avs/journal/jvstb/28/3/10.1116/1.3425632
2010-05-17
2014-12-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/3/10.1116/1.3425632
10.1116/1.3425632
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