Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments
(Color online) XPS spectra of the ACL before and after the plasma treatment: (a) and (b) core-level spectra.
(Color online) Optical images of the DI water and diiodomethane droplets on the plasma-treated ACL surface.
(Color online) XPS spectra of the APTMS treatment of the plasma-treated ACL: (a) and (b) core-level spectra.
Cross-sectional FESEM images of the 100 nm trench pattern filled with variable electroless Cu plating times: (a) 90 s, (b) 3 min, and (c) 5 min.
Surface tension parameters of the probe liquids used in the contact angle measurements and the contact angles measured using the two probe liquids.
Surface energy value of the untreated and plasma-treated ACLs.
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