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Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments
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10.1116/1.3442474
/content/avs/journal/jvstb/28/4/10.1116/1.3442474
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/4/10.1116/1.3442474

Figures

Image of FIG. 1.
FIG. 1.

(Color online) XPS spectra of the ACL before and after the plasma treatment: (a) and (b) core-level spectra.

Image of FIG. 2.
FIG. 2.

(Color online) Optical images of the DI water and diiodomethane droplets on the plasma-treated ACL surface.

Image of FIG. 3.
FIG. 3.

(Color online) XPS spectra of the APTMS treatment of the plasma-treated ACL: (a) and (b) core-level spectra.

Image of FIG. 4.
FIG. 4.

Cross-sectional FESEM images of the 100 nm trench pattern filled with variable electroless Cu plating times: (a) 90 s, (b) 3 min, and (c) 5 min.

Tables

Generic image for table
TABLE I.

Surface tension parameters of the probe liquids used in the contact angle measurements and the contact angles measured using the two probe liquids.

Generic image for table
TABLE II.

Surface energy value of the untreated and plasma-treated ACLs.

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/content/avs/journal/jvstb/28/4/10.1116/1.3442474
2010-06-28
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Conformal electroless filling of Cu into patterned amorphous carbon layer modified by oxygen plasma and aminosilane treatments
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/4/10.1116/1.3442474
10.1116/1.3442474
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