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Novel planarizing scheme for patterned media
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10.1116/1.3455497
/content/avs/journal/jvstb/28/4/10.1116/1.3455497
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/4/10.1116/1.3455497
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram showing the proposed planarization scheme.

Image of FIG. 2.
FIG. 2.

(Color online) AFM images of fabricated patterned sample (a) before and (b) after planarization. The AFM profiles of fabricated patterned sample (c) before and (d) after planarization.

Image of FIG. 3.
FIG. 3.

(Color online) Cross-sectional TEM image of patterned sample.

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/content/avs/journal/jvstb/28/4/10.1116/1.3455497
2010-07-16
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Novel planarizing scheme for patterned media
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/4/10.1116/1.3455497
10.1116/1.3455497
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