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Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry
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10.1116/1.3484249
/content/avs/journal/jvstb/28/5/10.1116/1.3484249
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/5/10.1116/1.3484249
/content/avs/journal/jvstb/28/5/10.1116/1.3484249
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/content/avs/journal/jvstb/28/5/10.1116/1.3484249
2010-09-07
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/5/10.1116/1.3484249
10.1116/1.3484249
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