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Pyrolysis of two-dimensional and three-dimensional interferometrically patterned resist structures
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10.1116/1.3495756
/content/avs/journal/jvstb/28/6/10.1116/1.3495756
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3495756
/content/avs/journal/jvstb/28/6/10.1116/1.3495756
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/content/avs/journal/jvstb/28/6/10.1116/1.3495756
2010-10-28
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pyrolysis of two-dimensional and three-dimensional interferometrically patterned resist structures
http://aip.metastore.ingenta.com/content/avs/journal/jvstb/28/6/10.1116/1.3495756
10.1116/1.3495756
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